TNO - Solliance - S25 Process PSK Line
TNO offers a research infrastructure enabling the complete process of perovskite modules on an area up to 6 inch square (~15 x 15 cm2). The key equipment includes sputter tools for depositing transparent conductive oxide (TCO), sheet-to-sheet (S2S) slot-die coaters under inert and ambient conditions for perovskite and carrier transport layers (CTLs), S2S spatial atomic layer deposition (sALD) tools for CTLs and buffer layers, S2S laser interconnection tools with safe processing of particles, and S2S encapsulation tools. With respect to each equipment, reproducible material processes have been developed in order to fabricate efficient and stable perovskite modules. The infrastructure can be used to manufacture rigid, flexible and opaque or semi-transparent (or translucent) modules.